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Facilities

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BENEQ TFS-200 ALD Reactor

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High-temperature tube furnace (Nabertherm)

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Glove Box (MBRAUN UNIlab Plus)

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Programmable Spin Coating System

(APEX India, spinNXG P2 H)

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CHI Instrument (CHI423B)

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Rigaku SmartLab x-ray difrractometer

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Four-Cathode RF/DC Magnetron sputtering unit

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